Real-time in situ growth study of TiN- and TiC xN y-based superhard nanocomposite coatings using spectroscopic ellipsometry

P. Jedrzejowski*, Aram Amassian, E. Bousser, J. E. Klemberg-Sapieha, L. Martinu

*Corresponding author for this work

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Abstract

We investigate in situ and in real-time the growth of superhard ternary nanocomposite (nc)-TiNamorphous (a) - Si3 N4 and quaternary nc-Ti Cx Ny a-SiCN films. Using nondestructive, noncontact spectroscopic ellipsometry and appropriate ellipsometric models, we determine the variation of optical constants, film resistivity, and electron scattering time and mean free path as a function of thickness and particle size. Based on the optical and electrical behavior, we propose a microstructural model of superhard nanocomposite films, postulating the interconnectivity between individual nanoparticles, presence of defects in the individual grains, and particle size varying in the initial stage of the film growth.

Original languageEnglish (US)
Article number071915
JournalApplied Physics Letters
Volume88
Issue number7
DOIs
StatePublished - Feb 24 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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