Real-index guided blue-green laser diode with small beam astigmatism fabricated using ZnO buried structure

Toshiya Yokogawa*, Satoshi Kamiyama, Shigeo Yoshii, Kazuhiro Ohkawa, Ayumu Tsujimura, Yoichi Sasai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Real index-guided blue-green lasers with a small beam astigmatism have been demonstrated. A ZnO buried layer with low refractive index and high resistivity was used to obtain the real index-guided structure. The ridge stripe was fabricated by electron cyclotron resonance plasma etching with Cl2/H2 discharge which realizes anisotropic etching. The beam astigmatism value for the ZnO buried ridge waveguide laser was measured to be less than 0.5 μm as a result of the real index-guiding effect, in contrast to 25 μm for the conventional gain-guided laser. A stable single lateral mode operation was also obtained at up to 18 mW for the real index-guided laser.

Original languageEnglish (US)
Pages (from-to)L314-L316
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume35
Issue number3 A
DOIs
StatePublished - Mar 1 1996

Keywords

  • II-VI compounds
  • Index-guided laser
  • MBE
  • Ridge waveguide
  • Semiconductor laser
  • ZnCdSe
  • ZnMgSSe
  • ZnSSe

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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