Rapid selective metal patterning on polydimethylsiloxane (PDMS) fabricated by capillarity-assisted laser direct write

Ming-Tsang Lee, Daeho Lee, Alexander Sherry, Costas P Grigoropoulos

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

In this study we demonstrate a novel approach for the rapid fabricating micro scale metal (silver) patterning directly on a polydimethylsiloxane (PDMS) substrate. Silver nanoparticles were sintered on PDMS to form conductive metal films using laser direct write (LDW) technology. To achieve good metal film quality, a capillarity-assisted laser direct writing (CALDW) of nanoparticle suspensions on a low surface energy material (PDMS) was utilized. Experimental results showed controllable electrical conductivities and good film properties of the sintered silver patterns. This study reveals an advanced method of metal patterning on PDMS, and proposes a new research application of LDW in a nanoparticle colloidal environment. © 2011 IOP Publishing Ltd.
Original languageEnglish (US)
Pages (from-to)095018
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number9
DOIs
StatePublished - Aug 12 2011
Externally publishedYes

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