Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system

T. Stomeo*, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, E. Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

We report on the fabrication of two-dimensional photonic crystals (2D-PC) structures by means of a focused ion beam (FIB), which is an alternative process well suited for the fast prototyping of high quality 2D-PC devices. Through FIB process the removal of materials is achieved without the use of a patterned resist mask. We have fabricated two different short in-plane cavities: the ridge geometry configuration, obtained through trenches etched down to the bottom cladding by means of a FIB process, and a second identical cavity terminated by a 2D-PC back mirror consisting of a triangular lattice of air holes in GaAs slab. Both the ridge cavity and the photonic crystal cavity have been optically characterized by detecting their edge-emitted photoluminescence. As expected, by virtue of its higher back mirror reflectivity leading to lower cavity losses, the 2D-PC cavity shows the occurrence of amplified spontaneous emission at an excitation power density three times lower than in the standard ridge cavity.

Original languageEnglish (US)
Pages (from-to)417-421
Number of pages5
JournalMicroelectronic Engineering
Volume78-79
Issue number1-4
DOIs
StatePublished - Mar 2005
Externally publishedYes

Keywords

  • Finite difference time domain
  • Focused ion beam
  • Laser cavity
  • Photonic crystal

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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