Pulsed-laser irradiation quantum well intermixing process in GaInAs/GaInAsP laser structures

T. K. Ong, Y. W. Chen, Boon Ooi, Y. L. Lam, Y. C. Chan

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

We report the development and characterization of a postgrowth bandgap modification technique of GaInAs/GaInAsP laser structures utilizing a Q-switched Nd:YAG laser with a pulse length of approx. 8 ns and repetition rate of 10 Hz. Quantum well intermixing effect of the samples irradiated under pulsed energy densities of 2.8, 3.5 and 3.9 mJ mm-2 at different exposure times was studied. A maximum bandgap shift of up to 112 meV has been observed from sample exposed to 3.9 mJ mm-2 for 5 min after subsequent annealing in a rapid thermal processor at 625°C for 120 s. A spectrum broadening of 3 meV, relative to the as-grown sample, was obtained from intermixed sample exposed to 2.8 mJ mm-2 for 1 min indicating that the quality of the material remains high. A differential bandgap shift of 60 meV has been obtained between a gold-masked region and laser-irradiated region. Lasers with bandgap tuned to 82 nm relative to the as-grown lasers have been fabricated using this technique.

Original languageEnglish (US)
Pages (from-to)349-355
Number of pages7
JournalMicroelectronic Engineering
Volume51
DOIs
StatePublished - Jan 1 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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