Pulsed laser deposition of PLZT films: Structural and optical characterization

M. Gaidi*, Aram Amassian, M. Chaker, M. Kulishov, L. Martinu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

45 Scopus citations

Abstract

Transparent lanthanum-modified lead zirconate titanate (PLZT) thin films with electro-optic properties were deposited on indium-doped tin oxide (ITO) coated glass by pulsed laser deposition (PLD). Stoichiometric films with the crystallographic perovskite structure required for electro-optical behaviour, and a composition ratio close to 9/65/35 were obtained. The microstructural, optical and electro-optic properties of these films were studied for different substrate temperatures, T s , and reactor oxygen pressure, P O2 . The films annealed at 700°C in oxygen at atmospheric pressure are highly (110) perovskite orientated and free of the undesired pyrochlore phase. The optical constants (n and k as a function of wavelength) of the films were obtained using variable angle spectroscopic ellipsometry (VASE) and spectrophotometry in the UV-Vis-NIR regions. They appear to be strongly depending on the deposition conditions. A high quadratic electro-optic coefficient, close to that of the bulk value, was obtained at 632.8nm by single-beam (ellipsometric) configuration.

Original languageEnglish (US)
Pages (from-to)347-354
Number of pages8
JournalApplied Surface Science
Volume226
Issue number4
DOIs
StatePublished - Mar 30 2004

Keywords

  • Electro-optic
  • PLD
  • PLZT (9/65/35)
  • Surface morphology
  • XRD

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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