Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

Angus Kingon, Michael Ameen, Orlando Auciello, Kenneth Gifford, Husam Niman Alshareef, Thomas Graettinger, Shanghsien Rou, Philip Hren

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


This paper emphasizes the need to determine the relationships between processing and structure (including microstructure) in ferroelectric thin films. The use of an automated ion beam deposition system is demonstrated, which allows the controlled deposition of films at low processing temperatures. A key feature is the real-time composition monitoring, during deposition, which allows stoichiometry to be precisely controlled. Microstructures (including defects) in KNbO3 and lead zirconate titanate films are investigated, and differences between the two materials emphasized.

Original languageEnglish (US)
Pages (from-to)35-49
Number of pages15
Issue number1
StatePublished - Jan 1 1991

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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