Polymethylglutarimide as a structural MEMS material

Ian Grant Foulds, R. W. Johnstone, M. Hamidi, S. Tsang, M. Parameswaran

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF 2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

Original languageEnglish (US)
Title of host publication2007 Canadian Conference on Electrical and Computer Engineering, CCECD
Pages300-303
Number of pages4
DOIs
StatePublished - Dec 1 2007
Event2007 Canadian Conference on Electrical and Computer Engineering, CCECD - Vancouver, BC, Canada
Duration: Apr 22 2007Apr 26 2007

Publication series

NameCanadian Conference on Electrical and Computer Engineering
ISSN (Print)0840-7789

Other

Other2007 Canadian Conference on Electrical and Computer Engineering, CCECD
CountryCanada
CityVancouver, BC
Period04/22/0704/26/07

Keywords

  • Acutator
  • PMGI
  • Polymer
  • Polymethylglutarimide
  • Structural material

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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