Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

Ian Grant Foulds, R. W. Johnstone, S. H. Tsang, M. Hamidi, M. Parameswaran

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 6 ppm °C-1 and Young's modulus to be 5.0 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties.

Original languageEnglish (US)
Article number045026
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number4
DOIs
StatePublished - Apr 1 2008

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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