Planar self-aligned imprint lithography for coplanar plasmonic nanostructures fabrication

Weiwei Wan, Liang Lin, Yelong Xu, Xu Guo, Xiaoping Liu, Haixiong Ge, Minghui Lu, Bo Cui, Yanfeng Chen

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Nanoimprint lithography (NIL) is a cost-efficient nanopatterning technology because of its promising advantages of high throughput and high resolution. However, accurate multilevel overlay capability of NIL required for integrated circuit manufacturing remains a challenge due to the high cost of achieving mechanical alignment precision. Although self-aligned imprint lithography was developed to avoid the need of alignment for the vertical layered structures, it has limited usage in the manufacture of the coplanar structures, such as integrated plasmonic devices. In this paper, we develop a new process of planar self-alignment imprint lithography (P-SAIL) to fabricate the metallic and dielectric structures on the same plane. P-SAIL transfers the multilevel imprint processes to a single-imprint process which offers higher efficiency and less cost than existing manufacturing methods. Such concept is demonstrated in an example of fabricating planar plasmonic structures consisting of different materials. © 2014 Springer-Verlag Berlin Heidelberg.
Original languageEnglish (US)
Pages (from-to)657-662
Number of pages6
JournalApplied Physics A
Volume116
Issue number2
DOIs
StatePublished - Mar 1 2014
Externally publishedYes

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