Piezoelectric transducer array microspeaker

Armando Arpys Arevalo Carreno, David Conchouso Gonzalez, David Castro, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
Original languageEnglish (US)
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages180-183
Number of pages4
ISBN (Print)9781509019472
DOIs
StatePublished - Dec 19 2016

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