Piezoelectric array elements for sound reconstruction with a digital input

Armando Arpys Arevalo Carreno (Inventor), David Conchouso Gonzalez (Inventor), David Castro Signoret (Inventor), Ian G. Foulds (Inventor)

Research output: Patent

Abstract

Various examples are provided for digital sound reconstruction using piezoelectric array elements. In one example, a digital loudspeaker includes a fixed frame and an array of transducers disposed on the fixed frame. Individual transducers of the array of transducers can include a flexible membrane disposed on a piezoelectric actuation element positioned over a corresponding opening that extends through the fixed frame. In another example, a method includes forming a flexible membrane structure on a substrate and backetching the substrate opposite the flexible membrane structure. The flexible membrane structure can be formed by disposing a first electrode layer on a substrate, disposing a piezoelectric layer on the first electrode layer and disposing a second electrode layer on the piezoelectric layer. A flexible membrane layer (e.g., polyimide) can be disposed on the second electrode layer.
Original languageEnglish (US)
Patent numberWO 2016162829 A1
StatePublished - Oct 13 2016

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