Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

Armando Arpys Arevalo Carreno, David Conchouso Gonzalez, David Castro, Marlon Diaz, Ian G. Foulds

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.
Original languageEnglish (US)
Pages (from-to)545-549
Number of pages5
JournalMicro & Nano Letters
Volume10
Issue number10
DOIs
StatePublished - Oct 27 2015

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