Optical properties of Er3+-doped SiO2-GeO2-Al2O3 planar waveguide fabricated by sol-gel processes

Q. Xiang, Y. Zhou, Boon Ooi, Y. L. Lam, Y. C. Chan, C. H. Kam

Research output: Contribution to journalArticlepeer-review

41 Scopus citations


In this paper, we report silica based planar waveguides doped with Er3+, and co-doped with GeO2 and Al2O3. These sol-gel derived planar waveguides were fabricated on SOS (silica on silicon) using multiple spin-coating and rapid thermal processing (RTP). Investigation has been made on their characteristics in terms of their application in optical amplification and lasing, including photoluminescence (PL), fluorescence lifetime, refractive index, propagation loss, surface roughness, Fourier transform infrared (FTIR) spectrum and X-ray diffraction (XRD) analysis. The propagation loss of a 20-layer planar waveguide was measured to be about 1.6 dB/cm for TE0 and 2.2 dB/cm for TM0 mode. A strong emission transition (4I13/24I15/2) at 1.536 μm with a lifetime of 3.6 ms has been obtained for an optimized molar composition of 90SiO2:10GeO2:20AlO1.5:1ErO1.5.

Original languageEnglish (US)
Pages (from-to)243-247
Number of pages5
JournalThin Solid Films
Issue number1
StatePublished - Jul 17 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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