Optical and microstructural properties of diamond-like carbon films grown by pulsed laser deposition

A. Hu*, Issam Al Khesho, H. Zhou, W. W. Duley

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

Diamond-like carbon films have been fabricated using 308 nm excimer laser ablation in vacuum followed by deposition at temperatures between 77 K and 573 K. Optical band gap energies are obtained from UV/optical spectroscopy. Raman spectra and X-ray photoelectron spectra (XPS) show that the sp3/(sp2 + sp3) ratio in these films is in excess of 0.7 in films deposited at 77 K and 300 K. This ratio decreases to 0.2 in films deposited at 573 K. It is found that films deposited at cryogenic temperatures consist of a matrix structure assembled from embedded nanometer clusters, while films deposited at 300 K or higher temperature are amorphous and atomically flat. Microstructural features in cryogenic films are discussed in relation to the mechanism of deposition and possible phase transitions during assembly of these films.

Original languageEnglish (US)
Pages (from-to)149-154
Number of pages6
JournalDiamond and Related Materials
Volume16
Issue number1
DOIs
StatePublished - Jan 1 2007

Keywords

  • Cryogenic deposition
  • Diamond-like carbon films
  • Nanostructure
  • Optical characterization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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