One-step multi-depth polystyrene molds for PDMS soft-lithography through laser-induced bumping

Huawei Li*, Yiqiang Fan, Ian G. Foulds

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this article, we report a mask-less and cleanroom-independent technique to fabricate Polydimethylsiloxane (PDMS)-based multi-depth microfluidic devices using a polystyrene (PS) mold with laser-induced multi-height bump patterns for PDMS soft-lithography. This technique offers a rapid and low-cost alternative to conventional PDMS mold creation, which requires more complicated mask-based photolithography process, and it also eliminates the cumbersome precise alignment/bonding of microchannel layers to fabricate a 3D structure [1]. This paper reports the first use of this new laser bumping technique for creating multi-height molds for soft-lithography.

Original languageEnglish (US)
Title of host publicationProceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
PublisherChemical and Biological Microsystems Society
Pages656-658
Number of pages3
ISBN (Print)9780979806452
StatePublished - 2012
Event16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 - Okinawa, Japan
Duration: Oct 28 2012Nov 1 2012

Other

Other16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
CountryJapan
CityOkinawa
Period10/28/1211/1/12

Keywords

  • Bump
  • Microfluidic
  • Multi-depth microchannel
  • PDMS

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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