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One step electron-beam lithography for multipurpose diffractive optical elements with 200 nm resolution
E. Di Fabrizio*, L. Grella, M. Baciocchi, M. Gentili, D. Peschiaroli, L. Mastrogiacomo, R. Maggiora
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations