Off-axis low coherence interferometry for surface topology measurement

Yves Delacrétaz*, Daniel Boss, Florian Lang, Christian Depeursinge

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

Original languageEnglish (US)
Title of host publicationSpeckle 2010
Subtitle of host publicationOptical Metrology
DOIs
StatePublished - Nov 8 2010
EventSpeckle 2010: Optical Metrology - Florianopolis, Brazil
Duration: Sep 13 2010Sep 15 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7387
ISSN (Print)0277-786X

Other

OtherSpeckle 2010: Optical Metrology
CountryBrazil
CityFlorianopolis
Period09/13/1009/15/10

Keywords

  • Low coherence
  • interferometry
  • topology measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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