Note: Fabrication of a fast-response and user-friendly environmental chamber for atomic force microscopes

Yanfeng Ji, Fei Hui, Yuanyuan Shi, Tingting Han, Xiaoxue Song, Chengbin Pan, Mario Lanza

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

The atomic force microscope is one of the most widespread tools in science, but many suppliers do not provide a competitive solution to make experiments in controlled atmospheres. Here, we provide a solution to this problem by fabricating a fast-response and user-friendly environmental chamber. We corroborate the correct functioning of the chamber by studying the formation of local anodic oxidation on a silicon sample (biased under opposite polarities), an effect that can be suppressed by measuring in a dry nitrogen atmosphere. The usefulness of this chamber goes beyond the example here presented, and it could be used in many other fields of science, including physics, mechanics, microelectronics, nanotechnology, medicine, and biology.
Original languageEnglish (US)
JournalReview of Scientific Instruments
Volume86
Issue number10
DOIs
StatePublished - Oct 1 2015
Externally publishedYes

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