Nonlinear dynamics of mems arches

Sami Alkharabsheh, Mohammad Younis*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, the dynamic response of electrostatically actuated clamped-clamped arch microbeam is investigated when excited by a DC load superimposed to an AC harmonic load. The dynamic analysis is carried out using a Galerkin-based reduced order model along with a shooting technique to find periodic motions and analyzing its stability using a Floquet theory. Results are presented for the cases of primary and super harmonic resonances. We found several nonlinear dynamic phenomena due to the inherent nonlinear electrostatic force and geometric nonlinearity of the arch. These include frequency-amplitude dependence, jumps, tangent bifurcations, coexistence of solutions, and softening and hardening behaviors. The shooting technique showed high robustness in capturing both the stable and unstable states of the system. Hence, it helped clarify vague behaviors that were previously reported using longtime integration of the equations of motion.

Original languageEnglish (US)
Title of host publicationASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Pages445-451
Number of pages7
Volume8
EditionPARTS A AND B
DOIs
StatePublished - 2010
Externally publishedYes
EventASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010 - Vancouver, BC, Canada
Duration: Nov 12 2010Nov 18 2010

Other

OtherASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
CountryCanada
CityVancouver, BC
Period11/12/1011/18/10

ASJC Scopus subject areas

  • Mechanical Engineering

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