Nonlinear dynamics of a MEMS resonator: Theoretical and experimental investigation

Laura Ruzziconi*, Ahmad M. Bataineh, Mohammad I. Younis, Weili Cui, Stefano Lenci

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

In this study we present a theoretical and experimental investigation of a microelectromechanical system (MEMS). The device is constituted of a clamped-clamped polysilicon microbeam electrostatically and electrodynamically actuated. The microbeam has a slightly curled up configuration, which is an imperfection commonly encountered as a consequence of the microfabrication process. Using a laser Doppler vibrometer, many experimental frequency sweeps are conducted in a neighborhood of the first symmetric natural frequency. To simulate the dynamics, we derive a single-mode reduced-order model. Extensive numerical investigations are performed, based on frequency response diagrams and behavior charts. The overall scenario of the response is explored, when both the frequency and the electrodynamic voltage are varying. This analysis is able to provide a very good matching with the experiments. Nevertheless, the theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because the theoretical curves represent the ideal limit case where disturbances are absent, which never occurs in experiments and practice. To overcome this drawback and extend the results to the practical case where disturbances exist, we develop a dynamical integrity analysis. After introducing dynamical integrity concepts, we perform integrity profiles and integrity charts. They are able to describe if each attractor is robust enough to tolerate the disturbances. They detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable, i.e., depending on the expected disturbances, they provide valuable information to operate the device in safe conditions according to the desired outcome.

Original languageEnglish (US)
Title of host publication9th International Conference on Mathematical Problems in Engineering, Aerospace and Sciences, ICNPAA 2012
Pages822-829
Number of pages8
Volume1493
DOIs
StatePublished - 2012
Externally publishedYes
Event9th International Conference on Mathematical Problems in Engineering, Aerospace and Sciences, ICNPAA 2012 - Vienna, Austria
Duration: Jul 10 2012Jul 14 2012

Other

Other9th International Conference on Mathematical Problems in Engineering, Aerospace and Sciences, ICNPAA 2012
CountryAustria
CityVienna
Period07/10/1207/14/12

Keywords

  • dynamical integrity
  • microelectromechanical systems
  • multistability
  • nonlinear dynamics

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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