Nonlinear-based switch triggered by gas using electrostatically actuated microbeams

Adam Bouchaala, Omar Yassine, Mohamed Eddaoudi, Nizar Jaber, Osama Shekhah, Mohammad Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

Original languageEnglish (US)
Title of host publication21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791850145
DOIs
StatePublished - Jan 1 2016
EventASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 - Charlotte, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016
CountryUnited States
CityCharlotte
Period08/21/1608/24/16

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modeling and Simulation

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