NEW UV RESISTS WITH NEGATIVE OR POSITIVE TONE.

Hiroshi Ito*, C. Grant Willson, Jean M J Frechet

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

93 Scopus citations
Original languageEnglish (US)
Pages (from-to)86-87
Number of pages2
JournalDigest of Technical Papers - Symposium on VLSI Technology
StatePublished - 1982
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this