NEW APPROACH TO IMAGING SYSTEMS INCORPORATING CHEMICAL AMPLIFICATION: SYNTHESIS AND PRELIMINARY EVALUATION OF NOVEL RESISTS BASED ON TERTIARY COPOLYCARBONATES.

Jean M J Frechet*, Francine Bouchard, Francis M. Houlihan, Boguslaw Kryczka, Eva Eichler, Nicholas Clecak, C. Grant Willson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

A new approach to imaging via chemical amplification based on polymeric materials which undergo acid-catalyzed thermolysis is described. A key feature of the novel resist materials is their ability of form stable latent images upon exposure in the deep UV; positive tone image development is then accomplished through a low temperature thermal step. The new imaging system consists of polycarbonates containing active structures such as tertiary diols used in combination with certain onium salts which can generate strong acid upon exposure. The polycarbonates are prepared by polycondensation of carbonate activated tertiary diols with bisphenol A or other bifunctional alcohols under phase-transfer conditions. Thermolysis or acidolysis of the polycarbonates results in the clean formation of volatile materials without any solid residue. Imaging of 1 mu m thick films of projection printing is reported.

Original languageEnglish (US)
Pages (from-to)59-64
Number of pages6
JournalJournal of Imaging Science
Volume30
Issue number2
StatePublished - Mar 1986
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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