Highly ordered nitrogen-doped titanium dioxide (N-doped TiO2) nanotube array films with enhanced photo-electrochemical water splitting efficiency (PCE) for hydrogen generation were fabricated by electrochemical anodization, followed by annealing in a nitrogen atmosphere. Morphology, structure and composition of the N-doped TiO2 nanotube array films were investigated by FE-SEM, XPS, UV-Vis and XRD. The effect of annealing temperature, heating rate and annealing time on the morphology, structure, and photo-electrochemical property of the N-doped TiO2 nanotube array films were investigated. A design of experiments method was applied in order to minimize the number of experiments and obtain a statistical model for this system. From the modelling results, optimum values for the influential factors were obtained in order to achieve the maximum PCE. The optimized experiment resulted in 7.42 % PCE which was within 95 % confidence interval of the predicted value by the model. © 2014 Springer Science+Business Media.
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