Nanoparticle Photoresists: Ligand Exchange as a New, Sensitive EUV Patterning Mechanism

Marie Kryask, Markos Trikeriotis, Christine Ouyang, Sovik Chakrabarty, Emmanuel P. Giannelis, Christopher K. Ober

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

Hybrid nanoparticle photoresists and their patterning using DUV, EUV, 193 nm lithography and e-beam lithography has been investigated and reported earlier. The nanoparticles have demonstrated very high EUV sensitivity and significant etch resistance compared to other standard photoresists. The current study aims at investigating and establishing the underlying mechanism for dual tone patterning of these nanoparticle photoresist systems. Infrared spectroscopy and UV absorbance studies supported by mass loss and dissolution studies support the current model. © 2013SPST.
Original languageEnglish (US)
Pages (from-to)659-664
Number of pages6
JournalJournal of Photopolymer Science and Technology
Volume26
Issue number5
DOIs
StatePublished - 2013
Externally publishedYes

Fingerprint Dive into the research topics of 'Nanoparticle Photoresists: Ligand Exchange as a New, Sensitive EUV Patterning Mechanism'. Together they form a unique fingerprint.

Cite this