Nanometer sized structures grown by pulsed laser deposition

Basma ElZein (Inventor), Yingbang Yao (Inventor), Elhadj Dogheche (Inventor), Samir Boulfrad (Inventor), Ghassan E. Jabbour (Inventor)

Research output: Patent

Abstract

Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber
Original languageEnglish (US)
Patent numberUS 20150280017 A1
StatePublished - Oct 1 2015

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