Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

M. T. Todaro*, T. Stomeo, V. Vitale, M. DeVittorio, A. Passaseo, R. Cingolani, F. Romanato, L. Businaro, Enzo Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

14 Scopus citations

Abstract

We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).

Original languageEnglish (US)
Pages (from-to)670-675
Number of pages6
JournalMicroelectronic Engineering
Volume67-68
DOIs
StatePublished - Jun 1 2003
EventProceedings of the 28th International Conference on MNE - Lugano, Switzerland
Duration: Sep 16 2002Sep 19 2002

Keywords

  • GaAs/AlGaAs
  • Oxidation
  • Photonic crystal
  • Waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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