We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.
|Original language||English (US)|
|Title of host publication||2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||5|
|State||Published - Aug 29 2017|