TY - JOUR
T1 - Multimode Excitation of a Metal Organics Frameworks Coated Microbeam for Smart Gas Sensing and Actuation
AU - Jaber, Nizar
AU - Ilyas, Saad
AU - Shekhah, Osama
AU - Eddaoudi, Mohamed
AU - Younis, Mohammad I.
N1 - KAUST Repository Item: Exported on 2021-02-19
Acknowledgements: We acknowledge financial support from King Abdullah University of Science and Technology.
PY - 2018/10/4
Y1 - 2018/10/4
N2 - Smart sensing systems suffer complexity requiring interface circuits, microcontrollers, switches, and actuators to detect and sense, process the signal and take a decision, and trigger an action upon demand. This increases the device footprint and boosts significantly the power required to actuate the system. Here, we present a hybrid sensor and switch device, which is capable of accurately measuring gas concentration and perform switching when the concentration exceeds specific (safe) threshold. The device is based on a clamped-clamped microbeam coated with metal-organic frameworks (MOFs). Using the electrostatic harmonic voltage, we employ dynamic multi-modal actuation in which the microbeam is simultaneously excited at the first mode of vibration, near the pull-in band, and at the third mode. We demonstrate experimentally the effectiveness of this technique in measuring the concentration of water vapor and achieving switching when the concentration exceeds a threshold value. In contrast to the first mode operation, we show that monitoring the third mode enhances sensitivity, improves accuracy, and lowers the sensor sensitivity to noise.
AB - Smart sensing systems suffer complexity requiring interface circuits, microcontrollers, switches, and actuators to detect and sense, process the signal and take a decision, and trigger an action upon demand. This increases the device footprint and boosts significantly the power required to actuate the system. Here, we present a hybrid sensor and switch device, which is capable of accurately measuring gas concentration and perform switching when the concentration exceeds specific (safe) threshold. The device is based on a clamped-clamped microbeam coated with metal-organic frameworks (MOFs). Using the electrostatic harmonic voltage, we employ dynamic multi-modal actuation in which the microbeam is simultaneously excited at the first mode of vibration, near the pull-in band, and at the third mode. We demonstrate experimentally the effectiveness of this technique in measuring the concentration of water vapor and achieving switching when the concentration exceeds a threshold value. In contrast to the first mode operation, we show that monitoring the third mode enhances sensitivity, improves accuracy, and lowers the sensor sensitivity to noise.
UR - http://hdl.handle.net/10754/628916
UR - https://www.sciencedirect.com/science/article/pii/S0924424718310550
UR - http://www.scopus.com/inward/record.url?scp=85054570425&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2018.10.004
DO - 10.1016/j.sna.2018.10.004
M3 - Article
AN - SCOPUS:85054570425
VL - 283
SP - 254
EP - 262
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
ER -