Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

Qiu Xu, Lvjun Wang, Alhammam Niyazi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.
Original languageEnglish (US)
Title of host publication2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherIEEE
ISBN (Print)9781665412674
DOIs
StatePublished - Jun 20 2021

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