Multi-axis micromirror for optical coherence tomography

Umer Izhar, Boon Ooi, Svetlana Tatic-Lucic*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30° that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100°C increase with respect to ambient at angular deflection of 30°.

Original languageEnglish (US)
Pages (from-to)1147-1150
Number of pages4
JournalProcedia Chemistry
Volume1
Issue number1
DOIs
StatePublished - Sep 1 2009
EventEurosensors 23rd Conference - Lausanne, Switzerland
Duration: Sep 6 2009Sep 9 2009

Keywords

  • Angular Deflection
  • Electrothermal Actuator
  • Micromirror
  • Multi-axis mirror
  • OCT imaging
  • Optical Scanner

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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