Modeling squeeze-film damping of electrostatically actuated microplates undergoing large deflections

Mohammad I. Younis, Ali H. Nayfeh*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

A model for the dynamics of electrostatically actuated microplates undergoing large deflections under the effect of squeeze-film damping is presented. The model predicts the quality factors of microplates under a wide range of gas pressures and applied electrostatic forces up to the pull-in instability. The model utilizes the nonlinear Euler-Bernoulli beam equation, the von Kármán plate equations, and the compressible Reynolds equation. The static deflection of the microplate is calculated using the beam model. Analytical expressions are derived for the pressure distribution in terms of the plate mode shapes around the deflected position using perturbation techniques. The static deflection and the analytical expressions are substituted into the plate equations, which are solved using a finite-element method. Several results are presented showing the effect of the pressure and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors.

Original languageEnglish (US)
Title of host publicationProc. of the ASME Int. Des. Eng. Tech. Conf. and Comput. and Information in Engineering Conferences - DETC2005
Subtitle of host publication5th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Pages1969-1978
Number of pages10
Volume6 C
StatePublished - 2005
Externally publishedYes
EventDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States
Duration: Sep 24 2005Sep 28 2005

Other

OtherDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityLong Beach, CA
Period09/24/0509/28/05

ASJC Scopus subject areas

  • Engineering(all)

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