Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Amro M. Elshurafa, P.H. Ho, Khaled N. Salama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

In this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a variable capacitor that possesses a top suspended plate with a specific fractal geometry and also possesses a bottom fixed plate complementary in shape to the top plate has been fabricated in the PolyMUMPS process. An important benefit that was achieved from using the fractal geometry in designing the MEMS variable capacitor is increasing the tuning range of the variable capacitor beyond the typical ratio of 1.5. The modeling was carried out using the commercially available finite element software COMSOL to predict both the tuning range and pull-in voltage. Measurement results show that the tuning range is 2.5 at a maximum actuation voltage of 10V.
Original languageEnglish (US)
Title of host publication2013 IEEE International Symposium on Circuits and Systems (ISCAS2013)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages2711-2714
Number of pages4
ISBN (Print)9781467357623
DOIs
StatePublished - Aug 14 2013

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