Mixed frequency excitation of an electrostatically actuated resonator

Abdallah Ramini, Alwathiqbellah I. Ibrahim, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We investigate experimentally and theoretically the dynamics of a capacitive resonator under mixed frequency excitation of two AC harmonic signals. The resonator is composed of a proof mass suspended by two cantilever beams. Experimental measurements are conducted using a laser Doppler vibrometer to reveal the interesting dynamics of the system when subjected to two-source excitation. A nonlinear single-degree-of-freedom model is used for the theoretical investigation. The results reveal combination resonances of additive and subtractive type, which are shown to be promising to increase the bandwidth of the resonator near primary resonance frequency. Our results also demonstrate the ability to shift the combination resonances to much lower or much higher frequency ranges. We also demonstrate the dynamic pull-in instability under mixed frequency excitation. © 2015 Springer-Verlag Berlin Heidelberg
Original languageEnglish (US)
Pages (from-to)1967-1974
Number of pages8
JournalMicrosystem Technologies
Volume22
Issue number8
DOIs
StatePublished - Apr 24 2015

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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