Micromachined porous polymer for bubble free electro-osmotic pump

Senol Mutlu, Cong Yu, P. Selvaganapathy, Frantisek Svec, Carlos H. Mastrangelo, Jean Frechet

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free electro-osmotic flow with reversible net movement. Testing of the device produced an average water-air interface velocity of 1.8 μm/s at 0.8 Hz. The velocity was increased to 4.8 and to 13.9 μm/s by necking the channel size.

Original languageEnglish (US)
Pages (from-to)19-23
Number of pages5
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs
StatePublished - Jan 1 2002

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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