Microlithographic techniques for laser assisted fabrication of bioelectronic devices

Enzo Di Fabrizio*, M. Gentili, P. Morales, R. Pilloton, J. Mela, S. Santucci, A. Sese

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.

Original languageEnglish (US)
Pages (from-to)3280-3282
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number21
DOIs
StatePublished - Nov 18 1996

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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