Microlenses metrology with digital holographic microscopy

Florian Charrière*, Jonas Kühn, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Kenneth Weible, Christian Depeursinge

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

Digital holographic Microscopy (DHM) is an imaging modality reconstructing the wavefront in a numerical form, directly from a single digitalized hologram. It brings quantitative data derived simultaneously from the amplitude and phase of the complex reconstructed wavefront diffracted by the object and it is used to determine the refractive index and/or shape of the object with accuracy in the nanometer range along the optical axis. DHM comprises a microscope objective to adapt the sampling capacity of the camera to the information content of the hologram. This paper illustrates some of the possibilities offered by DHM for micro-optics quality control. Actual results obtained by DHM, yielding an axial precision up to 3.7 nm, will be compared with measurements performed with interferometers by SUSS MicroOptics SA and with the profiles measured with a mechanical scanning probe instrument (Alpha step 200 from Tencor Instrument). Two different micro-lenses arrays where tested: a quartz refractive lenses array (observed with transmission DHM) and a Silicon refractive lens array (observed with reflection DHM).

Original languageEnglish (US)
Article number37
Pages (from-to)447-453
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5856 PART I
DOIs
StatePublished - Dec 19 2005
EventOptical Measurement Systems for Industrial Inspection IV - Munich, Germany
Duration: Jun 13 2005Jun 17 2005

Keywords

  • Holography
  • Micro-optics
  • Microscopy
  • Phase-contrast

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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