Microfabrication techniques and devices for thermal management of electronic devices

Mohamed T. Ghoneim (Inventor), Muhammad Mustafa Hussain (Inventor)

Research output: Patent

Abstract

A method of fabricating a thermal management device. The method includes depositing a seed layer, using a seed layer depositing technique, on a side of a support base; growing a heat sink base layer on a side of the seed layer; depositing a hard mask on a side of the support base directly opposite that containing the seed and heat sink base layers; patterning the hard mask with a photoresist mask; etching the patterned hard mask with an etching technique, wherein the etching creates trenches in the underlying support base, exposing the seed layer; removing the hard mask with a hard mask removal technique; depositing a layer of photoresist on the heat sink base layer; growing heat sinks using a heat sink growth technique on the exposed seed layer; removing the photoresist layer with a photoresist layer removal technique; and removing the support base with a support base removal technique.
Original languageEnglish (US)
Patent numberWO2018087612A1
StatePublished - May 17 2018

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