Metrology study of sub 20Å oxynitride by corona-oxide-silicon (COS) and conventional C-V approaches

Pui Yee Hung*, George A. Brown, Michelle Zhang, Joe Bennett, Husam N. Al-Shareef, Chadwin Young, Chris Oroshiba, Alain Diebold

*Corresponding author for this work

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Chemical Compounds

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Engineering & Materials Science