Methods for obtaining hollow nano-structures

Francesco De Angelis (Inventor), Enzo Di Fabrizio (Inventor)

Research output: Patent

Abstract

Methods are provided for obtaining hollow nano-structures which include the steps of providing a suspended film starting layer on a support substrate, depositing on the starting layer a sacrificial layer, performing, in progressive sequence, a complete erosion phase of said support substrate and starting layer and performing an at least partial erosion phase of the sacrificial layer previously deposited on the starting layer so as to obtain holes passing through the starting layer and passing or non passing through the sacrificial layer, depositing, on the side of the support substrate opposite to that where the starting layer is put, at least one covering layer arranged to internally cover the holes created by the progressive erosion. Hollow nano-structures formed by such methods are also provided.
Original languageEnglish (US)
Patent numberUS9067242B2
Priority date01/26/11
StatePublished - Jun 30 2015
Externally publishedYes

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