Method For Producing Mechanically Flexible Silicon Substrate

Muhammad Mustafa Hussain (Inventor), Jhonathan Prieto Rojas (Inventor)

Research output: Patent

Abstract

A method for making a mechanically flexible silicon substrate is disclosed. In one embodiment, the method includes providing a silicon substrate. The method further includes forming a first etch stop layer in the silicon substrate and forming a second etch stop layer in the silicon substrate. The method also includes forming one or more trenches over the first etch stop layer and the second etch stop layer. The method further includes removing the silicon substrate between the first etch stop layer and the second etch stop layer.
Original languageEnglish (US)
Patent numberUS9520293B2
StatePublished - Aug 28 2014

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