MEMS mass-spring-damper systems using an out-of-plane suspension scheme

Ahmed Kamal Said Abdel Aziz (Inventor), Abdel Hameed Sharaf (Inventor), Mohamed Yousef Serry (Inventor), Sherif Salah Sedky (Inventor)

Research output: Patent

Abstract

MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
Original languageEnglish (US)
Patent numberUS 8640541 B2
StatePublished - Feb 4 2014
Externally publishedYes

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