Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

P. Jedrzejowski*, J. Cizek, Aram Amassian, J. E. Klemberg-Sapieha, J. Vlcek, L. Martinu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH 4 /CH 4 /N 2 /Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al 2 O 3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.

Original languageEnglish (US)
Pages (from-to)530-534
Number of pages5
JournalProceedings, Annual Technical Conference - Society of Vacuum Coaters
StatePublished - Nov 10 2003
Event46th Annual Technical Conference Proceedings - San Francisco, CA, United States
Duration: May 3 2003May 8 2003

Keywords

  • Infrared spectroscopic ellipsometry
  • Mechanical properties
  • Microstructure
  • PECVD

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Fluid Flow and Transfer Processes
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Mechanical Properties of Hard SiCN Coatings Prepared by PECVD'. Together they form a unique fingerprint.

Cite this