A silicon based nanoelectromechanical resonator is fabricated and is actively tuned through electrostatic actuation. We present multifrequency excitation of a NEMS resonator to dynamically perform all the fundamental logic operations (NOT, NOR, XNOR, NAND, OR, AND, and XOR). The multifrequency excitation allows to uniquely define resonant and non-resonant states as high and low logic outputs for all fundamental logic gates. The performance of this logic device is examined in terms of its speed of operation, energy consumption, and integration density. This work paves the way towards energy efficient nano-elements-based mechanical computing.
|Original language||English (US)|
|Title of host publication||2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||5|
|State||Published - Dec 13 2018|