Mechanical Computing Using Multifrequency Excited NEMS Resonator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A silicon based nanoelectromechanical resonator is fabricated and is actively tuned through electrostatic actuation. We present multifrequency excitation of a NEMS resonator to dynamically perform all the fundamental logic operations (NOT, NOR, XNOR, NAND, OR, AND, and XOR). The multifrequency excitation allows to uniquely define resonant and non-resonant states as high and low logic outputs for all fundamental logic gates. The performance of this logic device is examined in terms of its speed of operation, energy consumption, and integration density. This work paves the way towards energy efficient nano-elements-based mechanical computing.
Original languageEnglish (US)
Title of host publication2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages229-233
Number of pages5
ISBN (Print)9781538652732
DOIs
StatePublished - Dec 13 2018

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