Mechanical and optical properties of hard SiCN coatings prepared by PECVD

P. Jedrzejowski, J. Cizek, Aram Amassian, J. E. Klemberg-Sapieha*, J. Vlcek, L. Martinu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

131 Scopus citations

Abstract

Novel amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400 °C. Mechanical properties such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, micro-scratch and curvature methods. Films deposited under optimized conditions exhibited a hardness > 30 GPa, Young's modulus > 190 GPa, elastic rebound of 85% and a compressive stress of approximately 1 GPa. A friction coefficient against Al2O3, ranging from 0.75 to 0.25 and a low surface roughness of approximately 1 nm were found to be accompanied by a refractive index ranging from 1.85 to 2.10 (at 550 nm) and an extinction coefficient between 1.0 × 10-4 and 4.5 × 10 -2. The film behavior is correlated with the microstructure and composition determined by SEM, XPS, AFM and broad-range UV-VIS-NIR-IR spectroscopic ellipsometry.

Original languageEnglish (US)
Pages (from-to)201-207
Number of pages7
JournalThin Solid Films
Volume447-448
DOIs
StatePublished - Jan 30 2004
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: Apr 28 2002May 2 2002

Keywords

  • Mechanical properties
  • Microstructure
  • PECVD
  • SiCN
  • Spectroscopic ellipsometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Fingerprint

Dive into the research topics of 'Mechanical and optical properties of hard SiCN coatings prepared by PECVD'. Together they form a unique fingerprint.

Cite this