Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Jonas Kühn*, Etienne Cuche, Yves Emery, Tristan Colomb, Florian Charrière, Frédéric Montfort, Mikhail Botkine, Nicolas Aspert, Christian Depeursinge

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60× magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 urn transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

Original languageEnglish (US)
Title of host publicationOptical Micro- and Nanometrology in Microsystems Technology
Volume6188
DOIs
StatePublished - 2006
Externally publishedYes
EventOptical Micro- and Nanometrology in Microsystems Technology - Strasbourg, France
Duration: Apr 5 2006Apr 7 2006

Other

OtherOptical Micro- and Nanometrology in Microsystems Technology
CountryFrance
CityStrasbourg
Period04/5/0604/7/06

Keywords

  • Corner cube
  • Digital holography
  • High aspect-ratio
  • Metrology
  • Microscopy
  • Transparent microstructures

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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