Magnesium aluminium spinel thin film as a humidity sensor

G. Gusmano*, G. Montesperelli, Enrico Traversa, A. Bearzotti, G. Petrocco, A. D'Amico, C. Di Natale

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humidity sensors. Mg-Al spinel thin films were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results.

Original languageEnglish (US)
Pages (from-to)460-463
Number of pages4
JournalSensors and Actuators: B. Chemical
Volume7
Issue number1-3
DOIs
StatePublished - Jan 1 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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