Low voltage RF MEMS variable capacitor with linear C-V response

Amro M. Elshurafa, Pak Hung Ho, Khaled N. Salama

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the top suspended plate moves towards the bottom fixed plate, the vertical capacitance increases whereas the horizontal capacitance decreases simultaneously such that the sum of the two capacitances yields a linear capacitance-voltage relation. © 2012 The Institution of Engineering and Technology.
Original languageEnglish (US)
Pages (from-to)392
JournalElectronics Letters
Volume48
Issue number7
DOIs
StatePublished - Mar 29 2012

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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