Low threading dislocation density aluminum nitride on silicon carbide through the use of reduced temperature interlayers

Humberto M. Foronda, Feng Wu, Christian Zollner, Muhammad Esmed Alif, Burhan Saifaddin, Abdullah Almogbel, Michael Iza, Shuji Nakamura, Steven P. DenBaars, James S. Speck

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Physics & Astronomy